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This book offers a concise description of procedures for precision actuator modeling and control. It addresses four main schemes: modeling and control of precise actuators; nonlinear control of precise actuators, including sliding mode control and neural network feedback control; fault detection and fault-tolerant control; and advanced air bearing control. A substantial part of the book addresses application issues in the modeling and control of precise actuators, providing several interesting case studies for more application-oriented readers.
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