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Boron nitride thin films

Jezik EngleskiEngleski
Knjiga Meki uvez
Knjiga Boron nitride thin films Jean Lorenzzi
Libristo kod: 06816880
Nakladnici VDM Verlag, srpanj 2010
In this work we present the results of the thin films of boron nitride deposited by D.C. and R.F. ma... Cijeli opis
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In this work we present the results of the thin films of boron nitride deposited by D.C. and R.F. magnetron sputtering from hot-pressed B4C and h-BN targets on two different substrates: Si3N4 ceramics with different surface finishing and Si(100) wafers. The influence of parameters such as substrate temperature and working gas composition ratio (N2 or Ar), on film thickness, deposition rate, cristallinity, residual stress, phase composition and hardness, were systematically investigated using techniques like SEM, XRD, FT-IR and nanohardness.

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Informacije o knjizi

Puni naziv Boron nitride thin films
Autor Jean Lorenzzi
Jezik Engleski
Uvez Knjiga - Meki uvez
Datum izdanja 2010
Broj stranica 96
EAN 9783639076356
ISBN 3639076354
Libristo kod 06816880
Nakladnici VDM Verlag
Težina 150
Dimenzije 152 x 229 x 6

Kategorija

Technology, Engineering, Agriculture > Technology: general issues > Engineering: general
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