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Doping Engineering for Front-End Processing: Volume 1070

Jezik EngleskiEngleski
Knjiga Tvrdi uvez
Knjiga Doping Engineering for Front-End Processing: Volume 1070 B. J. PawlakM. L. PelazM. LawK. Surugo
Libristo kod: 02060462
Nakladnici Materials Research Society, listopad 2008
Materials scientists, silicon technologists and TCAD researchers come together in this book to share... Cijeli opis
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Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

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Informacije o knjizi

Puni naziv Doping Engineering for Front-End Processing: Volume 1070
Autor B. J. PawlakM. L. PelazM. LawK. Surugo
Jezik Engleski
Uvez Knjiga - Tvrdi uvez
Datum izdanja 2008
Broj stranica 319
EAN 9781605110400
ISBN 160511040X
Libristo kod 02060462
Nakladnici Materials Research Society
Težina 568
Dimenzije 157 x 235 x 23

Kategorija

Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering > Electronic devices & materials
Technology, Engineering, Agriculture > Mechanical engineering & materials > Materials science
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