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Germanium Surface Preparation Methods

Name: Germanium Surface Preparation Methods
Brand: VDM Verlag Dr. Mueller E.K.
SKU: 06985696
Price: 51.17 EUR
Availability: InStock
Author: Jungyup Kim
ISBN: 9783836484114

Germanium Surface Cleaning and Preparation Methodsfor Semiconductor Applications

Jungyup Kim

Jezik

Engleski

Knjiga Meki uvez

Libristo kod: 06985696

Nakladnici VDM Verlag Dr. Mueller E.K., listopad 2008

Germanium is gaining interest in the semiconductorindustry as a replacement channel material for hig... Cijeli opis

Libristo kod: 06985696

125 b

51.17 €

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Germanium is gaining interest in the semiconductorindustry as a replacement channel material for highmobility applications. Contamination directlyaffects the device performance, yield andreliability. Therefore, continued device scaling isdependent on effective surface preparation includingeffective contamination and particle removal ofgermanium surface. Cleaning and preparation methodsfor silicon surface have been extensively developedover the past few decades. Germanium surfacecleaning and preparation is at its infancy and ismarkedly different from that of silicon. This bookexamines these differences and fundamentals involvedin germanium surface cleaning. This book alsoproposes methods for basic germanium surfacecleaning and the basis for further processdevelopment for professionals involved in surfacecleaning of semiconductor materials.