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Glow Discharge Processes - Sputtering and Plasma Etching

Name: Glow Discharge Processes - Sputtering and Plasma Etching
Brand: John Wiley & Sons Inc
SKU: 04887388
Price: 259.18 EUR
Availability: InStock
Author: Brian Chapman
ISBN: 9780471078289

Brian Chapman

Jezik

Engleski

Knjiga Tvrdi uvez

Libristo kod: 04887388

Nakladnici John Wiley & Sons Inc

Develops detailed understanding of the deposition and etching of materials by sputtering discharge,... Cijeli opis

Libristo kod: 04887388

628 b

259.18 €

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Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.