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Nanoparticle Engineering for Chemical-Mechanical Planarization

Jezik EngleskiEngleski
Knjiga Tvrdi uvez
Knjiga Nanoparticle Engineering for Chemical-Mechanical Planarization Jea-Gun Park
Libristo kod: 06708211
Nakladnici Taylor & Francis Inc, veljača 2009
Explains the physicochemical properties of nanoparticles according to each step in the chemical mech... Cijeli opis
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Explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarization (CMP) process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation CMP and noble metal CMP. This work also presents design techniques using polymeric additives to improve CMP performance.

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Informacije o knjizi

Puni naziv Nanoparticle Engineering for Chemical-Mechanical Planarization
Autor Jea-Gun Park
Jezik Engleski
Uvez Knjiga - Tvrdi uvez
Datum izdanja 2009
Broj stranica 224
EAN 9781420059113
ISBN 9781420059113
Libristo kod 06708211
Nakladnici Taylor & Francis Inc
Težina 570
Dimenzije 156 x 234 x 20

Kategorija

Technology, Engineering, Agriculture > Technology: general issues > Nanotechnology
Technology, Engineering, Agriculture > Industrial chemistry & manufacturing technologies > Industrial chemistry & chemical engineering
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