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Process development for nanostructuring and 3D micro/nanointegration

Jezik EngleskiEngleski
Knjiga Meki uvez
Knjiga Process development for nanostructuring and 3D micro/nanointegration Senn Tobias
Libristo kod: 09187233
Nakladnici Sudwestdeutscher Verlag Fur Hochschulschriften AG, siječanj 2015
Micro- and Nanostructures significantly influence the physical and chemical properties of surfaces.... Cijeli opis
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Micro- and Nanostructures significantly influence the physical and chemical properties of surfaces. Therefore, such structures can be used to functionalize surfaces and adjust the surface properties to the specific requirements of a certain application. A remaining challenge is the integration of functional structures into micro devices to achieve e.g. patterning in 3D, 3D surface structures and sidewall patterning. This work is focused on the development of processes to achieve both, the accurate replication of micro and nanostructures as well as the integration of functional surface structures into micro devices.

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Informacije o knjizi

Puni naziv Process development for nanostructuring and 3D micro/nanointegration
Autor Senn Tobias
Jezik Engleski
Uvez Knjiga - Meki uvez
Datum izdanja 2015
Broj stranica 180
EAN 9783838150284
ISBN 3838150287
Libristo kod 09187233
Nakladnici Sudwestdeutscher Verlag Fur Hochschulschriften AG
Težina 272
Dimenzije 152 x 229 x 10

Kategorija

Technology, Engineering, Agriculture > Technology: general issues > Engineering: general
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