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This Reprint includes some of the latest developments in SiC microsystems such as power electronics, micromachines and microsensors. Silicon carbide continues to grow in areas of extreme temperature and mechanical fatigue where silicon is prone to reliability and performance issues. The compilation of papers in this Special Issue mainly investigates state-of-the-art power electronics, used in all of these applications; additionally, two papers address the latest developments in MEMS and sensors.
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