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Spectroscopic Ellipsometry - Principles and Applications

Jezik EngleskiEngleski
Knjiga Tvrdi uvez
Knjiga Spectroscopic Ellipsometry - Principles and Applications Hiroyuki Fujiwara
Libristo kod: 04878436
Nakladnici John Wiley & Sons Inc, siječanj 2007
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semicond... Cijeli opis
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Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

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Informacije o knjizi

Puni naziv Spectroscopic Ellipsometry - Principles and Applications
Autor Hiroyuki Fujiwara
Jezik Engleski
Uvez Knjiga - Tvrdi uvez
Datum izdanja 2007
Broj stranica 392
EAN 9780470016084
ISBN 0470016086
Libristo kod 04878436
Nakladnici John Wiley & Sons Inc
Težina 762
Dimenzije 157 x 235 x 26

Kategorija

Mathematics & Science > Physics > Optical physics
Technology, Engineering, Agriculture > Mechanical engineering & materials > Materials science
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